Posted by JIM on March 06, 2000 at 07:37:13:
In Reply to: Live Steam Humidification in Clean Rooms posted by Walt on March 02, 2000 at 14:16:28:
The simplest way would be to use a particle counter during a room shutdown at the discharge of the ductwork and cycle the humidifier on and off noting any change in particulate levels. If you can't take a shutdown and have data logging for the room, look at particle count vs. the control signal to the humidifier. Injecting live steam after the HEPA filters will add particles to your room especially if it isn't clean steam. Be careful, injecting steam before HEPA'a can cause different problems. Though not mentioned be sure that the chemicals in the injected steam are compatable with your process.